File:Self-aligned via patterning.png

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Summary

Description
English: Self-aligned via patterning scheme. Left: Patterned unfilled trenches (blue). Center: Resist mask. Right: Vias patterned by etching through resist mask and hardmask (purple) surrounding trenches (blue).
Date
Source PowerPoint drawing
Author Guiding light
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Licensing

Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Original upload log

The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2015-08-26 11:04 994×309× (18501 bytes) Guiding light new label placement
2015-08-26 11:02 994×313× (10987 bytes) Guiding light new label placement
2015-08-26 11:01 994×313× (18535 bytes) Guiding light Corrected label of right picture
2015-07-22 16:11 984×309× (18233 bytes) Guiding light fixed some glitches
2015-07-22 15:37 984×309× (18248 bytes) Guiding light adjusted position of right oval
2015-07-22 15:36 984×309× (18236 bytes) Guiding light slight modification of positions
2015-07-22 14:43 984×309× (17810 bytes) Guiding light Different picture
2015-07-22 12:53 1004×309× (15295 bytes) Guiding light Left figure caption change
2015-07-22 12:50 1004×311× (15350 bytes) Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

Captions

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Items portrayed in this file

depicts

inception

22 July 2015

File history

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Date/TimeThumbnailDimensionsUserComment
current16:35, 30 September 2018Thumbnail for version as of 16:35, 30 September 2018990 × 309 (16 KB)Guiding lightStraighten right edge of central figure
16:33, 30 September 2018Thumbnail for version as of 16:33, 30 September 2018990 × 309 (16 KB)Guiding lightminor adjustment of bottom edge of central figure
16:32, 30 September 2018Thumbnail for version as of 16:32, 30 September 2018990 × 309 (16 KB)Guiding lightChange from diagonal pair to horizontal pair
06:14, 13 March 2016Thumbnail for version as of 06:14, 13 March 2016994 × 309 (18 KB)OgreBot(BOT): Reverting to most recent version before archival
06:14, 13 March 2016Thumbnail for version as of 06:14, 13 March 2016994 × 313 (11 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-08-26 11:02:44 by Guiding light
06:14, 13 March 2016Thumbnail for version as of 06:14, 13 March 2016994 × 313 (18 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-08-26 11:01:35 by Guiding light
06:14, 13 March 2016Thumbnail for version as of 06:14, 13 March 2016984 × 309 (18 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-22 16:11:28 by Guiding light
06:14, 13 March 2016Thumbnail for version as of 06:14, 13 March 2016984 × 309 (18 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-22 15:37:34 by Guiding light
06:14, 13 March 2016Thumbnail for version as of 06:14, 13 March 2016984 × 309 (18 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-22 15:36:23 by Guiding light
06:14, 13 March 2016Thumbnail for version as of 06:14, 13 March 2016984 × 309 (17 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-22 14:43:12 by Guiding light
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